HA-30C Mass Flow Controller
Features
| Accurate at Low Flow Fast Response Wide Pressure Range Compatibility Excellent Linearity Long - Term Stability High Corrosion Resistance Highly Stable Removable Sensor Compact Connection |
Digital Communication : [PIN14,15]
| RS - 485 Communication Baud rate : 38400bps Date : 8 Bit Stop Bite : 1 Bit Parity : None |
Specifications
| Model | HA-30C |
| Range(N2) | 0.01slpm~30slpm |
| Response Time | <1 sec |
| Accuracy | ±0.25% of FS |
| Repeatability | ±0.25% |
| In/Out Signal | 0~5Vdc or 4~20mA |
| Supply Power | +15 or +24Vdc, 350mA |
| Max Operating Pressure | < 90 bar |
| Max Operating Temp | 0~50° C |
| Leak Rate | 1X10-9atm. cc/sec |
| Control Range | 3~100% |
| Connection | "A" Dimension(mm) |
| 1/8" SWG 1/4" SWG 3/8" SWG 1/4" VCR | 126.7 131.3 134.3 127.8 |
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